Mems structure with a flexible membrane and improved...

H - Electricity – 01 – H

Patent

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Details

H01H 59/00 (2006.01)

Patent

CA 2755052

The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longi-tudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actua-tion means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

L'invention porte sur une structure de système micro-électromécanique (MEMS) qui comprend : une membrane flexible (6), qui a un axe longitudinal principal (6a) définissant une direction longitudinale (X), au moins un pilier (3, 3') sous la membrane flexible (6), des moyens d'actionnement d'abaissement électrique (7) qui sont conçus pour fléchir vers le bas la membrane flexible (6) dans un état forcé vers le bas, des moyens d'actionnement d'élévation électrique (8) qui sont conçus pour fléchir vers le haut la membrane flexible (6) vers un état forcé vers le haut. Les moyens d'actionnement d'abaissement électrique (7) ou les moyens d'actionnement d'élévation électrique (8) comprennent une zone d'actionnement (7c ou 8c), qui s'étend sous une partie de la membrane (6) et qui est conçue pour exercer des forces de traction sur la membrane (6) simultanément des deux côtés dudit ou desdits piliers (3) dans la direction longitudinale (X).

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