C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/34 (2006.01)
Patent
CA 2562727
A DLC film that has a low friction coefficient and that is superior in adhesion and wear resistance, and a method for forming the film are provided. A slide member having a protective film that has a low friction coefficient and that is superior in wear resistance and adhesion, and a method for forming the member are provided. Without using a solid carbon target, a metal composite diamond-like carbon (DLC) film is formed on a base material by introducing hydrocarbon gas as a metal target alone is sublimated by arc discharge and ionizing the metal and the hydrocarbon.
Kobayashi Kinya
Nishimura Etsuko
Shimoda Kenji
Borden Ladner Gervais Llp
Toyota Jidosha Kabushiki Kaisha
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