Metal deposition by liquid phase sputtering

Details Metal deposition by liquid phase sputtering Metal deposition by liquid phase sputtering

C - Chemistry, Metallurgy

23

C

342/48, 204/96.1

C23C 14/35 (2006.01) C23C 14/32 (2006.01) C23C 14/34 (2006.01)

Patent

CA 941781

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