Metal nano-objects, formed on semiconductor surfaces, and...

C - Chemistry – Metallurgy – 30 – B

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C30B 33/00 (2006.01) C30B 23/00 (2006.01) H01L 21/02 (2006.01) H01L 21/04 (2006.01) H01L 29/04 (2006.01) C23C 14/04 (2006.01) H01L 29/24 (2006.01)

Patent

CA 2491514

The invention concerns metal nano-objects, formed on semiconductor surfaces, and a method for making said nano-objects. The invention is applicable in nanoelectronics for example to obtain nano-objects (4) by deposition of a metal on a prepared cubic SiC surface (2).

Nano-objets métalliques, formés sur des surfaces de semiconducteurs, et procédé de fabrication de ces nano-objets.L'invention s'applique en nano- électronique et permet par exemple d'obtenir des nano-objets (4) par dépôt d'un métal sur une surface préparée (2) de SiC cubique.

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