Metal nitride coated substrates

Details Metal nitride coated substrates Metal nitride coated substrates

C - Chemistry, Metallurgy

23

C

C23C 18/12 (2006.01) C04B 41/50 (2006.01)

Patent

CA 2151931

A metal nitride coated substrate can be made by coating the substrate with an oxide of AL, Ti, or Zr or a hydroxide of Al, Ti, or Zr derived from a sol gel. The coated substrate is heated to a reaction temperature of at least about 850 °C and contacted with a gaseous reactant mixture comprising a nitrogen source and a carbon source. The molar ratio of nitrogen to carbon in the gaseous reactant mixture is at least about 15. The coated substrate is maintained at the reaction temperature for a sufficient time to convert the sol gel-derived coating to a metal nitride coating.

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