Metal polyoxyalkylated precursor solutions in an octane...

Details Metal polyoxyalkylated precursor solutions in an octane... Metal polyoxyalkylated precursor solutions in an octane...

H - Electricity

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H01B 3/20 (2006.01) C23C 18/12 (2006.01) C30B 7/00 (2006.01) H01L 21/316 (2006.01) H01L 21/70 (2006.01)

Patent

CA 2197775

A liquid precursor solution for use according to a method of manufacturing metal oxide electronic components (10) includes a polyoxyalkylated metal complex dispersed in an alkane solvent. The alkane solvent is preferably n-octane.

Solution précurseur liquide destinée à être utilisée dans un procédé d'élaboration de composants électroniques (10) d'oxyde métallique mettant en oeuvre un complexe métallique polyoxyalkylé dispersé dans un solvant alcane. Le solvant alcane est de préférence n-octane.

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