Metalization systems for heater/sensor elements

Details Metalization systems for heater/sensor elements Metalization systems for heater/sensor elements

H - Electricity

01

C

356/107

H01C 7/02 (2006.01) G01F 1/684 (2006.01) G01P 5/10 (2006.01)

Patent

CA 1313570

22 ABSTRACT A metallized heater and sensor element for flow sensors having a substantially linear temperature coefficient of resistance of at least 2000 parts per million/°C, having a first metal layer of a refractory metal, a second metal layer of a noble metal, a substrate supporting said first metal layer with conductor leads attached thereto for connection in circuit. Methods of fabrication of the heater and sensor elements are also disclosed.

608727

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