Method and apparatus for actuation of a two-axis mems device...

Details Method and apparatus for actuation of a two-axis mems device... Method and apparatus for actuation of a two-axis mems device...

H - Electricity

02

N

H02N 1/00 (2006.01) B81B 3/00 (2006.01) G02B 26/08 (2006.01) G02B 26/10 (2006.01)

Patent

CA 2478213

Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi--directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

L'invention concerne un appareil et des procédés permettant d'entraîner un miroir microélectromécanique biaxial au moyen de trois éléments ou électrodes d'actionnement sans contact. Une commande de miroir bidirectionnelle de différentiel utilise des tensions d'entraînement unipolaires polarisées à une valeur appropriée. Des fonctions de transformation mappent les commandes de basculement-inclinaison biaxiales avec les trois signaux d'entraînement d'actionnement pour des orientations et des dimensions d'électrode sélectionnée.

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