Method and apparatus for aligning diffraction grating

Details Method and apparatus for aligning diffraction grating Method and apparatus for aligning diffraction grating

G - Physics

02

B

G02B 27/62 (2006.01) G01B 11/26 (2006.01) G02B 5/18 (2006.01) G02B 7/00 (2006.01)

Patent

CA 2434011

A method and an apparatus for aligning a diffraction grating align the longitudinal direction of grooves of a diffraction grating to a predetermined direction. The method and apparatus detect a diffracted light pattern sent from the diffraction grating, and displace the diffraction grating such that the direction of an arranging direction obtained from the diffracted light pattern is aligned in the predetermined direction.

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