Method and apparatus for auto-focussing infinity corrected...

Details Method and apparatus for auto-focussing infinity corrected... Method and apparatus for auto-focussing infinity corrected...

G - Physics

02

B

G02B 7/28 (2006.01) G02B 7/36 (2006.01) G02B 21/00 (2006.01)

Patent

CA 2654431

The invention is directed at a method and apparatus for auto-focussing an infinity corrected microscope. Light beams are directed and then converged towards a specimen of interest and at least one image is formed from the reflected light. The image, or images, are then reviewed and calibration measurements are retrieved from the image. These calibration measurement are then used to determine focussing measurements which are used to auto-focus the microscope.

L'invention concerne une méthode et un appareillage de mise au point automatique pour un microscope corrigé à l'infini. Des faisceaux de lumière sont dirigés de façon à converger vers un échantillon examiné et au moins une image est formée par la lumière réfléchie. L'image, ou les images, sont ensuite réexaminées et des mesures d'étalonnage sont extraites de ladite image. Ces mesures d'étalonnage sont ensuite utilisées pour déterminer des mesures de focale qui servent à effectuer la mise au point automatique du microscope.

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