Method and apparatus for cleaning surfaces with a glow...

Details Method and apparatus for cleaning surfaces with a glow... Method and apparatus for cleaning surfaces with a glow...

B - Operations, Transporting

44

C

B44C 1/22 (2006.01) B08B 3/12 (2006.01) B08B 6/00 (2006.01) B08B 7/00 (2006.01) B08B 7/02 (2006.01) B64C 23/00 (2006.01) C03C 15/00 (2006.01) C23F 1/00 (2006.01) C23F 1/02 (2006.01) C23G 5/00 (2006.01) H01J 37/32 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2222620

The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is prefferred. The plasma used to effect surface cleaning may be formed in atmospheric air or other gases at about one atmosphere of pressure, or at pressures below or above one atmosphere.

La surface d'une pièce est nettoyée en produisant un plasma à décharge lumineuse à une atmosphère, à l'équilibre, au-dessus de la surface de ladite pièce. La préférence est donnée à l'utilisation d'une atmosphère, et à des plasmas à décharge lumineuse uniformes produits par un dispositif à haute fréquence de piégeage d'ions à basse fréquence. Le plasma utilisé pour réaliser le nettoyage de surfaces peut être formé dans l'air atmosphérique ou à des pressions inférieures ou supérieures à une atmosphère.

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