C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 29/04 (2006.01) C23C 16/27 (2006.01) C23C 16/44 (2006.01) C23C 16/458 (2006.01)
Patent
CA 2190231
A method is disclosed depositing synthetic diamond film on a substrate, comprising the steps of pre- stressing said substrate to obtain a pre-deposition stress across a surface thereof, depositing said diamond film on the pre-stressed substrate surface, and cooling said film and substrate and relieving said pre- deposition stress during said cooling. There is also disclosed an apparatus for depositing synthetic diamond film on a substrate, comprising means for pre-stressing said substrate to obtain a pre-deposition stress across a surface thereof, means for depositing said diamond film on the pre-stressed substrate surface, and means for relieving said pre-deposition stress while cooling said film and substrate.
Gowling Lafleur Henderson Llp
Saint-Gobain/norton Industrial Ceramics Corporation
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