Method and apparatus for continuous sputter coating of fibers

Details Method and apparatus for continuous sputter coating of fibers Method and apparatus for continuous sputter coating of fibers

C - Chemistry, Metallurgy

23

C

C23C 14/34 (2006.01) C03C 25/10 (2006.01) C03C 25/22 (2006.01) C23C 14/35 (2006.01) C23C 14/56 (2006.01)

Patent

CA 2063780

METHOD AND APPARATUS FOR CONTINUOUS SPUTTER COATING OF FIBERS ABSTRACT Apparatus and method for continuously forming sputter-coated glass fibers. The apparatus includes a sputter vessel (24) into which freshly drawn fiber (16) is passed before surface contamination can occur. The sputter vessel (24) includes modular sputtering units which are arranged to provide sputter deposition of one or more coatings onto the fiber (16) or capillary tube as it passes through the sputter vessel. Roughing chambers (34 and 36) may be provided on either end of the sputter vessel (24) and include orifices sized to allow passage of the fiber (16) through the orifice without contact. An improved sputter coating apparatus is also disclosed.

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