Method and apparatus for controlling brightness and...

Details Method and apparatus for controlling brightness and... Method and apparatus for controlling brightness and...

H - Electricity

01

J

327/8

H01J 37/31 (2006.01) H01J 37/147 (2006.01) H01J 37/304 (2006.01)

Patent

CA 1041178

-1- METHOD AND APPARATUS FOR CONTROLLING BRIGHTNESS AND ALIGNMENT OF A BEAM OF CHARGED PARTICLES Abstract of the Disclosure A beam of charged particles has its alignment and brightness alter- nately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target. In operation the beam is applied to the target for a predetermined period of time. When the beam is not applied to the target it's positioning on the target is aligned and the brightness of the beam is controlled. This aligning and controlling occurs during a predetermined period of time between the periods of time when the beam is actually applied to the target. Apparatus for maintaining the substantially uniform current density of the beam of charge particles is also provided.

231509

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