Method and apparatus for controlling brightness and...

Details Method and apparatus for controlling brightness and... Method and apparatus for controlling brightness and...

H - Electricity

01

J

327/8

H01J 37/30 (2006.01) H01J 37/147 (2006.01) H01J 37/304 (2006.01)

Patent

CA 1054682

METHOD AND APPARATUS FOR CONTROLLING BRIGHTNESS AND ALIGNMENT OF A BEAM OF CHARGED PARTICLES Abstract of the Disclosure A beam of charged particles has its alignment and brightness controlled in accordance with the beam current. The measurements of the current and any corrections for alignment or brightness are made when the beam is not being applied to a target. The apparatus for maintaining substantially uniform brightness of the beam of charged particles has means for measuring the brightness of the beam. If the output of the measuring means is below a first predetermined level the brightness level is varied in one direction and if the out- put of the measuring means is above a second predetermined level the brightness level is varied in another direction.

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