Method and apparatus for correcting image distortions

Details Method and apparatus for correcting image distortions Method and apparatus for correcting image distortions

G - Physics

01

D

234/6

G01D 5/00 (2006.01) H04N 1/047 (2006.01) H04N 17/04 (2006.01) H04N 1/10 (2006.01)

Patent

CA 1208187

PATENT APPLICATION OF: ANDREW A. TARNOWSKI and BRIAN G. ANDERSON FOR: IMPROVED METHOD AND APPARATUS FOR CORRECTING IMAGE DISTORTIONS ABSTRACT OF THE DISCLOSURE A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric devia- tions measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

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