B - Operations – Transporting – 01 – J
Patent
B - Operations, Transporting
01
J
B01J 19/06 (2006.01) B29C 71/04 (2006.01) H01L 49/02 (2006.01) H05K 3/12 (2006.01) H05K 3/22 (2006.01)
Patent
CA 2730296
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor con-trol module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
Linvention concerne un appareil de vulcanisation pour le traitement thermique de films minces sur des substrats de basse température à des vitesses élevées. Lappareil de vulcanisation comprend une tête stroboscopique, un module de commande stroboscopique et un module de commande de convoyeur. Le module de commande stroboscopique commande la puissance, la durée et le taux de répétition dun jeu dimpulsions générées par une lampe flash sur la tête stroboscopique. Le module de commande de convoyeur ainsi que le module de commande stroboscopique assurent une synchronisation en temps réel entre le taux de répétition du jeu dimpulsions et la vitesse à laquelle le substrat est déplacé sous la tête stroboscopique, selon les informations de vitesse.
Jackson Doug K.
Martin Karl M.
Mccool Steven C.
Schroder Kurt A.
Kirby Eades Gale Baker
Ncc Nano Llc
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