Method and apparatus for detecting surface defects in a...

Details Method and apparatus for detecting surface defects in a... Method and apparatus for detecting surface defects in a...

G - Physics

01

N

340/124.5

G01N 21/31 (2006.01) G01N 21/89 (2006.01)

Patent

CA 1122672

ABSTRACT OF THE DISCLOSURE Quality control inspection of the surface of a workpiece is effected by scanning a coherent monchromatic light beam over the workpiece surface. Photomultipliers are used to generate two electrical signals respectively indicative of the magnitude of the specular component of light reflected from the workpiece and of the component of light scattered in a predetermined direction off the workpiece. These two signals are combined in a manner which serves to eliminate noise due to surface roughness of the workpiece. The combined signal is compared with a threshold value to provide an indication of surface defects. The inspection apparatus can incorporate a laser for producing the light beam which can be conveniently scanned across the workpiece surface using an oscillating mirror.

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