Method and apparatus for determining mis-registration

Details Method and apparatus for determining mis-registration Method and apparatus for determining mis-registration

H - Electricity

04

N

H04N 1/00 (2006.01) G06T 3/00 (2006.01) G07D 7/20 (2006.01)

Patent

CA 2100324

An image processing apparatus includes a data acquisition stage for acquiring data representative of several spatially separated regions of a sample. The apparatus also includes data storage means for storing reference data corresponding to the sample data. The two sets of data are compiled and analyzed to determine if the sample is shifted from a nominal position.

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