B - Operations – Transporting – 08 – B
Patent
B - Operations, Transporting
08
B
B08B 3/12 (2006.01) B08B 3/10 (2006.01) B08B 5/00 (2006.01) F26B 5/00 (2006.01) F26B 5/02 (2006.01) F26B 21/14 (2006.01) H01L 21/00 (2006.01) H01L 21/306 (2006.01) H01L 21/77 (2006.01)
Patent
CA 2248759
Method and apparatus for drying and cleaning objects (13A, 13B, 13C) that may have been wetted or contaminated in a manufacturing process. The objects are submerged in a rinse liquid (27) in an enclosed chamber (11), and aerosol particles (39) from a selected liquid (37) are introduced into the chamber above the rinse liquid surface (29), forming a thin film (30) on this surface. As the rinse liquid is slowly drained (41), some aerosol particles settle onto the exposed surfaces (14A, 14B, 14C) of the objects, and displace and remove rinse liquid residues from the exposed surfaces by a "chemical squeegeeing" effect. Surface contaminants are also removed by this process. Chamber pressure is maintained at or near the external environment pressure as the rinse liquid is drained from the chamber.
Méthode et appareil pour sécher et nettoyer des objets (13A, 13B, 13C) qui auraient pu être mouillés ou contaminés au cours d'un processus de fabrication. Les objets sont plongés dans un liquide rinçant (27) à l'intérieur d'une chambre fermée (11), après quoi des particules d'aérosol (39) d'un liquide choisi (37) sont introduites dans la chambre au-dessus de la surface du liquide rinçant (29), formant une fine pellicule (30) à la surface en question. Au fur et à mesure que l'on vide (41) lentement le liquide rinçant, quelques particules d'aérosol se déposent sur les surfaces exposées (14A, 14B, 14C) des objets, déplaçant et enlevant les restes du liquide rinçant des surfaces exposées grâce à l'effet d'"essorage chimique". Les contaminants des surfaces sont enlevés de la même manière. Lors du vidage de la chambre du liquide rinçant, la pression à l'intérieur de celle-ci est maintenue à un niveau proche de la pression atmosphérique.
Ferrell Gary W.
Spencer Thomas D.
All In One Microservice Inc.
Ferrell Gary W.
L-Tech Corporation
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