Method and apparatus for epitaxially growing a semiconductor...

Details Method and apparatus for epitaxially growing a semiconductor... Method and apparatus for epitaxially growing a semiconductor...

H - Electricity

01

L

148/2.55

H01L 21/208 (2006.01) C30B 19/06 (2006.01) C30B 19/10 (2006.01)

Patent

CA 986393

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