B - Operations – Transporting – 23 – K
Patent
B - Operations, Transporting
23
K
204/175, 327/28,
B23K 9/06 (2006.01) C23C 14/32 (2006.01) H01J 37/32 (2006.01)
Patent
CA 1248493
IMPROVED METHOD AND APPARATUS FOR EVAPORATION ARC STABILIZA- TION INCLUDING INITIAL TARGET CLEANING Abstract Apparatus and method for evaporation arc stabilization including a target having a surface of material of non- permeable material to be evaporated; circuitry for estab- lishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to confine the cathode spot to the target. The anode is closely spaced to the ring to prevent the arc from moving off the target and the ring, during initial arc cleaning of the target. In lieu of the magnetically permeable confinement ring, the anode itself may be permeable. Various configurations of the confinement ring are also disclosed together with various features for improving the operation thereof.
462927
Mccarthy Tetrault Llp
Vac-Tec Systems Inc.
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