Method and apparatus for evaporation arc stabilization for...

Details Method and apparatus for evaporation arc stabilization for... Method and apparatus for evaporation arc stabilization for...

C - Chemistry, Metallurgy

23

C

204/167, 204/96.

C23C 14/54 (2006.01) C23C 14/32 (2006.01)

Patent

CA 1235086

IMPROVED METHOD AND APPARATUS FOR EVAPORATION ARC STABILIZATION FOR NON-PERMEABLE TARGETS UTILIZING PERMEABLE STOP RING Abstract Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-per- eable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a mag- netically permeable material to thereby confine the cathode spot to the target surface.

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