C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/14 (2006.01) G01T 1/20 (2006.01) H04N 5/32 (2006.01)
Patent
CA 2454446
A method is provided for fabricating in a thermal evaporation system (100) a polycrystalline film capable of directly detecting radiation. Source material (112) is placed in a container, and the container is evacuated to create vacuum within the container. The source material (112) is heated to evaporate the source material for depositing on a substrate (114). The polycrystalline film is used in as deposited form to detect the radiation.
L'invention concerne un procédé permettant de fabriquer dans un système d'évaporation thermique (100) un film polycristallin capable de détecter directement un rayonnement. On place une matière source (112) dans un contenant, et on évacue l'air dudit contenant pour y créer un vide. On chauffe ladite matière source (112) pour l'évaporer, de manière à former un dépôt sur un substrat (114). On utilise le film polycristallin sous forme de dépôt, afin de détecter le rayonnement.
Iwanczyk Jan S.
Patt Bradley E.
Dxray Inc.
Fetherstonhaugh & Co.
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