G - Physics – 01 – B
Patent
G - Physics
01
B
G01B 11/26 (2006.01) H05K 13/08 (2006.01)
Patent
CA 2192400
A method and apparatus measures a deviation in alignment between two components of a product wherein each component is characterized by a respective pattern and wherein each pattern comprises respective elements. The centroid of each element in each respective pattern is indicated, and based on the centriod indications, the center of each respective pattern is indicated. The deviation in alignment between the two components is determined as a function of the indicated position of the centers of the respective patterns, and positioning of the components is controlled as a function of the indicated position of the centers of the respective patterns.
Brady Michael Francis
Nguyen Hung Ngoc
Kirby Eades Gale Baker
Lucent Technologies Inc.
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