Method and apparatus for fabricating self-assembling...

Details Method and apparatus for fabricating self-assembling... Method and apparatus for fabricating self-assembling...

H - Electricity

01

L

H01L 21/70 (2006.01) H01L 21/98 (2006.01) H01L 25/04 (2006.01) H01L 25/065 (2006.01)

Patent

CA 2177219

A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.

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