Method and apparatus for focus position control in laser...

Details Method and apparatus for focus position control in laser... Method and apparatus for focus position control in laser...

B - Operations, Transporting

23

K

B23K 26/04 (2006.01)

Patent

CA 2175730

A method for focus position control in laser beam processing comprises the following steps: - imparting to the laser beam some minor focus oscillation that does not affect the process stability and processing quality, for the oscillatory displacement of the focus position, - detecting the laser-induced plasma by means of a sensor that generates a corresponding sensor signal, - determining the amplitude and phase of the sensor signal oscillation resulting from the focus oscillation, the amplitude and phase being representative of the deviation of the focus position from the optimum focus position, and - tracking the focus position in accordance with the deviation determined.

Affiliated with

Also associated with

Rating

Method and apparatus for focus position control in laser... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for focus position control in laser..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for focus position control in laser... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1612324