Method and apparatus for forming a thin-film solar cell...

C - Chemistry – Metallurgy – 23 – C

Patent

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C23C 16/00 (2006.01)

Patent

CA 2586966

The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes.

La présente invention concerne de nouveaux procédés de fabrication de dispositifs photovoltaïques et un appareil servant à mettre en oeuvre ces procédés. Un système de transfert est utilisé pour faire avancer des substrats de pièces à travailler à travers un appareil intégré qui comporte plusieurs chambres de traitement contrôlant chaque processus de fabrication.

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