Method and apparatus for forming diffusion junctions in...

Details Method and apparatus for forming diffusion junctions in... Method and apparatus for forming diffusion junctions in...

H - Electricity

01

L

H01L 21/225 (2006.01) H01L 31/068 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2070380

2070380 9208245 PCTABS00013 Silicon solar cells are made by subjecting substrates to a diffusion junction-forming process wherein a liquid source material containing a selected dopant is sprayed onto one side of the substrates, and thereafter the substrates are fired in an oxygen-containing environment under conditions calculated to cause the dopant to diffuse into the substrates so as to form a shallow p-n junction in each substrate.

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