Method and apparatus for gas phase coating complex internal...

B - Operations – Transporting – 05 – D

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B05D 7/22 (2006.01) C23C 16/00 (2006.01)

Patent

CA 2294261

A method and apparatus is provided to coat the internal surfaces of a hollow article having gas flow passages by supplying a coating gas to the passages with the coating gas flow rate to at least two of the passages controlled to a different rate to deposit a coating of desired thickness on the internal surfaces of each passage.

Procédé et dispositif servant à revêtir les surfaces intérieures d'un article creux possédant des passages d'écoulement de gaz, ce qui consiste à alimenter ces passages en un gaz de revêtement, dont le débit circulant dans au moins deux des passages est régulé à une vitesse différente, de manière à déposer un revêtement d'épaisseur souhaitée sur les surfaces intérieures de chaque passage.

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