Method and apparatus for glow discharge plasma treatment of...

H - Electricity – 05 – H

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H05H 1/46 (2006.01) D06M 10/00 (2006.01) H01J 37/32 (2006.01) H05B 7/16 (2006.01)

Patent

CA 2163967

A steady-state glow discharge plasma is generated at one atmosphere of pressure within the volume (S) between a pair of insulated metal plate electrodes (14) spaced up to 5 cm apart and rf energized with an rms potential of 1-5kV at 1- 100kHz (20). Space between the electrodes is occupied by air, nitrous oxide, and a noble gas such as helium, neon, argon, etc., or mixtures thereof. The electrodes are charged by an impedance matching network (31) adjusted to produce the most stable, uniform glow discharge. Also, a method for treating a meltblown polymer web, using the aforementioned plasma device, is included.

Un plasma à décharge luminescente à état permanent est généré à une atmosphère de pression dans le volume (S) situé entre deux électrodes (14) sous forme de plaques métalliques isolées espacées d'une distance allant jusqu'à 5 cm et excitées par RF à l'aide d'un potentiel RMS de 1-5kV à 1-100kHz (20). L'espace entre les électrodes est occupé par de l'air, de l'oxyde nitreux et un gaz noble tel que de l'hélium, du néon, de l'argon, etc., ou des mélanges desdits gas. Les électrodes sont chargées par un réseau (31) d'adaptation d'impédance réglé pour produire la décharge luminescente la plus stable et la plus uniforme. Un procédé de traitement d'un tissu polymère soufflé en fusion utilisant ledit dispositif à plasma est également décrit.

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