Method and apparatus for imaging of features on a substrate

Details Method and apparatus for imaging of features on a substrate Method and apparatus for imaging of features on a substrate

G - Physics

06

T

G06T 7/00 (2006.01)

Patent

CA 2729977

A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.

L'invention porte sur un procédé pour l'imagerie de caractéristiques sur un substrat, comprenant le balayage du substrat et la production d'une image de celui-ci, la superposition d'un modèle de grille sur l'image, l'ajustement du modèle de grille aux emplacements d'au moins certaines des caractéristiques sur l'image, et l'extraction d'images des caractéristiques.

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