Method and apparatus for in situ removal of contaminants...

Details Method and apparatus for in situ removal of contaminants... Method and apparatus for in situ removal of contaminants...

H - Electricity

01

J

H01J 37/317 (2006.01) H01J 37/30 (2006.01)

Patent

CA 2181076

Method and apparatus are provided for removal of contaminant material adhered to interior surfaces of an ion beam neutralization (46) apparatus and ion implantation apparatus (18) of an ion beam implanter (10). Contaminant material is removed from the neutralization apparatus and the implantation apparatus using aplasma glow discharge. The contaminant material is also removed from the neutralization apparatus by expanding the ion beam (16).

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