Method and apparatus for ion beam transport

Details Method and apparatus for ion beam transport Method and apparatus for ion beam transport

H - Electricity

01

J

H01J 37/317 (2006.01) H01J 37/30 (2006.01) H01L 21/77 (2006.01)

Patent

CA 2193709

Method and apparatus for maintaining an ion beam along a beam path from an ion source to an ion implantation station where workpieces are treated with the ion beam. A beam neutralizer is positioned upstream from the beam implantation station and injects neutralizing electrons into the ion beam. A magnetic field is created upstream from the position of the beam neutralizer for inhibiting upstream movement of neutralizing electrons. A disclosed technique for setting up the magnetic field for inhibiting electron movement is with spaced apart first and second permanent magnets.

'invention est une méthode et un dispositif servant à stabiliser le faisceau ionique entre une source d'ions et une station d'implantation ionique où des pièces sont bombardées par le faisceau ionique. Un neutraliseur de faisceau est installé en amont de la station d'implantation et injecte des électrons de neutralisation dans le faisceau ionique. Un champ magnétique est créé en amont du neutraliseur de faisceau pour empêcher les électrons de neutralisation de remonter jusqu'à la source. Une méthode est révélée pour créer le champ magnétique de blocage des électrons au moyen de deux aimants permanents espacés l'un de l'autre

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