Method and apparatus for low-energy scanning electron beam...

Details Method and apparatus for low-energy scanning electron beam... Method and apparatus for low-energy scanning electron beam...

H - Electricity

01

L

356/192, 358/22

H01L 21/423 (2006.01) H01J 37/317 (2006.01)

Patent

CA 1243782

METHOD AND APPARATUS FOR LOW-ENERGY SCANNING ELECTRON BEAM LITHOGRAPHY ABSTRACT An electron sensitive surface is patternized treated to a high resolution pattern of low-energy electrons without any need to do focussing by emitting the low-energy electrons from a pointed electrode and positioning the apex of the pointed electron emitting source suitably close to the surface being treated.

502799

Affiliated with

Also associated with

Rating

Method and apparatus for low-energy scanning electron beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for low-energy scanning electron beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for low-energy scanning electron beam... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1238398