Method and apparatus for maintaining desired exposure levels

Details Method and apparatus for maintaining desired exposure levels Method and apparatus for maintaining desired exposure levels

G - Physics

05

D

342/21, 341/97

G05D 3/12 (2006.01) G03F 7/00 (2006.01) G03F 7/20 (2006.01)

Patent

CA 2016388

TITLE METHOD AND APPARATUS FOR MAINTAINING DESIRED EXPOSURE LEVELS ABSTRACT A radiation beam used for selectively exposing a surface is moved in a helical path by means of two oscillating mirrors vibrating about axes that are mutually perpendicular. By maintaining a constant product for oscillating frequency and rotational oscillatory mirror deflection, the level of exposure can be made substantially constant. Case No.: IM-0235

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