Method and apparatus for making electrophotographic devices

Details Method and apparatus for making electrophotographic devices Method and apparatus for making electrophotographic devices

C - Chemistry, Metallurgy

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C

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C23C 14/28 (2006.01) C23C 4/12 (2006.01) C23C 16/50 (2006.01) G03G 5/082 (2006.01) H01J 37/32 (2006.01) H01L 21/00 (2006.01)

Patent

CA 1245183

ABSTRACT OF THE DISCLOSURE There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylin- drical members form narrow passages which communi- cate with the inner chamber. At least one reac- tion gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylin- drical members. The plasma can be formed by using either microwave energy or radio frequency ener- gy. More particularly disclosed is a method and apparatus for making electrophotographic drums.

474285

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