Method and apparatus for manufacturing high-purity silicon rods

Details Method and apparatus for manufacturing high-purity silicon rods Method and apparatus for manufacturing high-purity silicon rods

C - Chemistry, Metallurgy

30

B

356/178, 148/2.3

C30B 29/06 (2006.01) C01B 33/035 (2006.01) C23C 16/22 (2006.01) C23C 16/46 (2006.01)

Patent

CA 1083728

ABSTRACT OF THE DISCLOSURE A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod- shaped high-purity silicon carrier members which have been red- heated by directly passing an electric current therethrough there- by depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis or thermal decomposition on said red-heated carrier members while insulating the radiant heat between said red-heated carrier members along the overall length thereof.

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