Method and apparatus for measuring a three-dimensional...

Details Method and apparatus for measuring a three-dimensional... Method and apparatus for measuring a three-dimensional...

G - Physics

01

B

354/25, 350/32,

G01B 11/24 (2006.01)

Patent

CA 1294426

ABSTRACT A method and apparatus adapted to measure a three- dimensional curved surface shape quantitatively with high speed. A pattern of interference fringes on a surface of an object to be measured is picked up so that while moving a reference plane (or the object to bemeasured) in the direction of an optical axis, the resulting video signal is processed to form a composite image in which a value of each of picture elements is represented by a position of the reference plane (or a position of the object to be measured) at an instant that one of positions on the object surface corresponding to that picture element in the image attains a maximum brightness. Then, a three-dimensional curved surface shape of the object to be measured is measured on the basis of the composite image.

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