Method and apparatus for measuring deviation

Details Method and apparatus for measuring deviation Method and apparatus for measuring deviation

G - Physics

01

B

G01B 11/26 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2075253

A method and apparatus for measuring the deviation between elements on an object includes the steps of; and devices for performing the steps of forming at least a first physicooptical element on the object: forming at least a second physicooptical element on the object, the first and second physicooptical elements having lens functions; projecting light beams onto the first and second physicooptical elements on the object and detecting the incident positions of light beams travelling from the first and second physicooptical elements, having been subjected to the lens functions of the first and second physicooptical elements, on a predetermined surface; and detecting the deviation between the first and second physicooptical elements on the object from the relationship between the detected incident positions of the light beams.

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