Method and apparatus for measuring film thicknesses

Details Method and apparatus for measuring film thicknesses Method and apparatus for measuring film thicknesses

G - Physics

01

B

G01B 21/08 (2006.01) G01B 3/00 (2006.01) G01B 7/06 (2006.01)

Patent

CA 2355454

A method for measuring film thicknesses with the help of a measuring head (12), which is held with a holding device (14) against the film (10), so that the latter is deflected, wherein the reaction force (F), exerted by the film (10) on the measuring head (12), is measured and controlled to a specified nominal value by the movement of the measuring head

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