Method and apparatus for measuring the concentration of...

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G01N 21/00 (2006.01) G01N 21/39 (2006.01)

Patent

CA 1179861

A B S T R A C T The present invention relates to a method and apparatus for quantitatively determining the concentration of gaseous hydrogen fluoride in a medium containing gaseous hydro- gen fluoride. The apparatus has one or two lasers which provides a beam having two frequencies, a first frequency which is absorbed by gaseous hydrogen fluoride and a second frequency which is substantially unabsorbed by low pressure gaseous hydrogen fluoride and less absorbed than the first frequency by high pressure gaseous hydrogen fluoride or gaseous hydrogen fluoride plus other gases or vapours. Detectors detect the beam transmitted through the medium and calculator determines the concentration from the outputs of the detectors. The preferred lasers are infra red helium-neon lasers.

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