Method and apparatus for measuring the dimensions of an object

Details Method and apparatus for measuring the dimensions of an object Method and apparatus for measuring the dimensions of an object

G - Physics

01

B

G01B 11/02 (2006.01) G01B 11/245 (2006.01) G02B 26/12 (2006.01)

Patent

CA 2093551

Laser beams from separate sources are deflected by a rotating mirror and travel over further mirrors and objective lenses into a measuring field for measuring the dimensions of an object 3 in the x and y directions. The result is a simple, compact configuration. The separate optical systems for both measuring directions can be set in an optimum manner independently of one another, permitting great precision. Thanks to an offset of the optical axis of the incident laser beams relative to the rotation axis of the mirror the measurements in the two directions are made staggered in time so that the measurement signals can be processed in a common measuring channel.

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