Method and apparatus for phase-shifting an optical beam in a...

G - Physics – 02 – F

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G02F 1/025 (2006.01) G02F 1/313 (2006.01)

Patent

CA 2465830

A semiconductor-based gain optical phase-shifting device, method and apparatus. In one aspect of the present invention, an apparatus according to an embodiment of the present invention includes a semiconductor substrate through which an optical beam is to be directed along an optical path through the semiconductor substrate. A plurality of floating charge modulated regions are disposed along the optical path. A phase of the optical beam is responsive to a charge concentration in each of the plurality of floating charge modulated regions. A plurality of tunneling insulation layers (117) are disposed between each of the plurality of floating charge modulated regions and the semiconductor substrate. A plurality of control (121) nodes are disposed proximate to the plurality of floating charge modulated regions. Each of the control nodes control the charge concentration in a respective one of the plurality of floating charge modulated regions. A plurality of blocking insulation layers (119) disposed between each of the plurality of control nodes and the plurality of floating charge modulated regions.

La présente invention concerne un dispositif, un procédé et un appareil de déphasage optique à gain à semi-conducteurs. Selon un aspect de l'invention, un appareil correspondant à une forme de réalisation de la présente invention comprend un substrat semi-conducteur à travers lequel un faisceau optique doit être dirigé le long d'un chemin optique traversant le substrat semi-conducteur. Plusieurs régions modulées à charge flottante sont disposées le long du chemin optique. Une phase du faisceau optique réagit à une concentration de la charge dans chacune des régions modulées à charge flottante. Plusieurs couches (117) isolantes formant tunnel sont disposées entre chacune des régions modulées à charge flottante et le substrat semi-conducteur. Plusieurs noeuds de commande (121) sont disposés à proximité des nombreuses régions modulées à charge flottante. Chacun des noeuds de commande régule respectivement la concentration de la charge dans une région modulée à charge flottante respective des régions modulées à charge flottante. Plusieurs couches isolantes d'arrêt (119) sont disposées entre chacun des noeuds de commande et les nombreuses régions modulées à charge flottante.

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