G - Physics – 11 – B
Patent
G - Physics
11
B
G11B 7/26 (2006.01) G01N 21/89 (2006.01) G03F 7/30 (2006.01)
Patent
CA 2159100
In order to investigate the develop- ment of a photoresist layer (2) on an optical master disk (I) by developing fluid (14), a transparent body (4, 35, 50) is brought into contact with the developing fluid (14). A light beam (6) is then incident on the op- tical master disk (I) from a source (5) and a diffracted beam (8) passes through the developing fluid (14) and the transparent body (4, 35, 50) to a detector (9). In this way the optical path of the diffracted beam (8) is stable. Preferably, the diffracted beam (8) is generated from the incident light beam (6) by reflection, and prefer- ably it is a first-order diffracted beam. It is also preferable that the incident light beam (6) is modulated. The development of the photoresist layer is then monitored by mon- itoring changes in the diffracted light beam (8) detected by the detector (9).
Halliday Jonathan
Reynolds Gerald Alfred John
Bereskin & Parr
Nimbus Communications International Limited
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