Method and apparatus for producing layers of hard carbon...

Details Method and apparatus for producing layers of hard carbon... Method and apparatus for producing layers of hard carbon...

C - Chemistry, Metallurgy

23

C

204/182, 204/96.

C23C 14/06 (2006.01) C23C 14/28 (2006.01) C23C 14/32 (2006.01)

Patent

CA 2030847

ABSTRACT OF THE DISCLOSURE A method of producing layers of hard carbon modifi- cations on a substrate includes disposing the substrate in a vacuum chamber in which an anode electrode and a cathode electrode are disposed and spaced from one another. The anode electrode is made of a carbon containing agent and serves as a carbon source when a direct current is formed between the spaced electrodes. The two electrodes are energized forming a direct current arc in the vacuum between the spaced electrodes; and hydrogen is introduced directly into the region of the arc by flowing hydrogen through at least one of the two electrodes while simultaneously maintaining the arc between the electrodes to feed the arc with carbon from the anode thereby coating a surface of the substrate with a hard carbon layer.

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