Method and apparatus for producing neutral atomic and...

Details Method and apparatus for producing neutral atomic and... Method and apparatus for producing neutral atomic and...

H - Electricity

02

H

355/1, 353/14, 3

H02H 3/02 (2006.01) B64G 1/00 (2006.01) G21K 1/14 (2006.01) H05H 3/02 (2006.01)

Patent

CA 1256997

METHOD AND APPARATUS FOR PRODUCING NEUTRAL ATOMIC AND MOLECULAR BEAMS ABSTRACT OF THE DISCLOSURE A method and apparatus for producing a neutral beam of oxygen (29) or other gas for use in testing of materials and for heavy particle etching is disclosed. A beam of positively ionized gas (17) is accelerated and filtered to produce a beam (21) having ions of a selected energy. The beam is decelerated to an energy of the level required and directed toward a photo emissive surface (28) at a grazing incidence angle causing electrons to be contributed to the beam thereby neutralizing part of the ionized atoms and molecules of the beam. The neutralized beam (29) is directed through electrostatic deflection plates (31) which separate out remaining ionized particles producing a neutral beam (29).

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