Method and apparatus for producing semi-conductor material

Details Method and apparatus for producing semi-conductor material Method and apparatus for producing semi-conductor material

C - Chemistry, Metallurgy

30

B

148/2.1

C30B 25/08 (2006.01) C01B 33/02 (2006.01) C23C 16/00 (2006.01) C23C 16/22 (2006.01)

Patent

CA 996844

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