Method and apparatus for real-time high-speed inspection of...

Details Method and apparatus for real-time high-speed inspection of... Method and apparatus for real-time high-speed inspection of...

G - Physics

06

K

350/32, 354/72

G06K 9/62 (2006.01) G01R 31/308 (2006.01) G06K 9/00 (2006.01) G06T 7/00 (2006.01)

Patent

CA 1234908

METHOD OF AND APPARATUS FOR REAL-TIME HIGH-SPEED INSPECTIONS OF OBJECTS FOR IDENTIFYING OR RECOGNIZING KNOWN AND UNKNOWN PORTIONS THEREOF, INCLUDED DEFECTS AND THE LIKE Abstract This disclosure is concerned with real-time high-speed inspection of objects involving storing digital signal mask information of optical scans of objects at different magnifications, but with substan- tially the same field of view, and comparing digital mask information obtained by run scans of objects-to- be-inspected, at different magnifications, with the stored mask information to identify known or unknown portions of the objects, with adaptability for rapid "teaching" of large sets of objects for storage and subsequent comparison with real objects under inspec- tion.

450013

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