Method and apparatus for rejuvenating ion sources

Details Method and apparatus for rejuvenating ion sources Method and apparatus for rejuvenating ion sources

H - Electricity

01

J

204/96.13, 204/1

H01J 49/14 (2006.01) H01J 49/10 (2006.01)

Patent

CA 1107234

ABSTRACT OF THE DISCLOSURE Ion sources which become coated with insulative materials are rejuvenated by forming the repeller electrode in the ion source of gold and bombarding such repeller electrode with ions to sputter the gold onto the coated surfaces to render the conductive again. Gold sputtering is accomplished by bombarding the gold repeller electrode with inert argon ione. To perform this method, the slit of the extractor plate in the ion source is greatly reduced in cross- sectional area such that the normally higher sputtering pressures may be maintained within the ion source itself. If a direct sample probe is used, it too may be formed of gold and used to provide the gold sputtering source.

308036

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